000			00345nam a22001217a 4500
008			140327b xxu||||| |||| 00| 0 eng d
082			_a621.3
100			_aM.DOYLE , JOH . _910869
245			_aTHIN-FILM AND SEMICONDUCTOR INTEGRATED CIRCUITRY / _cJOH M.DOYLE .
260			_aUNITED STATES , _c1966 .
300			_a314 P.
942			_2ddc _cBK
999			_c14537 _d14537